5/12/2010	12:06:25 AM	Helium valve closed
5/12/2010	12:07:22 AM	Recipe started at 12:07 AM
5/12/2010	12:07:22 AM	Helium valve closed
5/12/2010	12:07:22 AM	BCl3 valve closed
5/12/2010	12:07:22 AM	PH3 valve closed
5/12/2010	12:07:22 AM	SiCl4 pre valve closed
5/12/2010	12:07:22 AM	SiCl4 post valve closed
5/12/2010	12:07:22 AM	Main Vac valve closed
5/12/2010	12:07:22 AM	Bypass valve closed
5/12/2010	12:07:22 AM	Bubbler valve closed
5/12/2010	12:07:22 AM	H2 valve opened
5/12/2010	12:07:22 AM	Helium MFC set to  0.000000
5/12/2010	12:07:22 AM	H2 MFC set to  500.000000
5/12/2010	12:07:22 AM	BCl3 MFC set to  0.000000
5/12/2010	12:07:22 AM	SiCl4 MFC set to  0.000000
5/12/2010	12:07:22 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	12:07:22 AM	Tube furnace set to 0
5/12/2010	12:08:42 AM	Helium valve closed
5/12/2010	12:08:42 AM	BCl3 valve closed
5/12/2010	12:08:42 AM	PH3 valve closed
5/12/2010	12:08:42 AM	SiCl4 pre valve closed
5/12/2010	12:08:42 AM	SiCl4 post valve closed
5/12/2010	12:08:42 AM	Main Vac valve closed
5/12/2010	12:08:42 AM	Bypass valve closed
5/12/2010	12:08:42 AM	H2 valve opened
5/12/2010	12:08:42 AM	Bubbler valve opened
5/12/2010	12:08:42 AM	Helium MFC set to  0.000000
5/12/2010	12:08:42 AM	H2 MFC set to  500.000000
5/12/2010	12:08:42 AM	BCl3 MFC set to  0.000000
5/12/2010	12:08:42 AM	SiCl4 MFC set to  0.000000
5/12/2010	12:08:42 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	12:08:42 AM	Tube furnace set to 1000
5/12/2010	12:28:42 AM	Helium valve closed
5/12/2010	12:28:42 AM	BCl3 valve closed
5/12/2010	12:28:42 AM	PH3 valve closed
5/12/2010	12:28:42 AM	Main Vac valve closed
5/12/2010	12:28:42 AM	Bypass valve closed
5/12/2010	12:28:42 AM	H2 valve opened
5/12/2010	12:28:42 AM	SiCl4 pre valve opened
5/12/2010	12:28:42 AM	SiCl4 post valve opened
5/12/2010	12:28:42 AM	Bubbler valve opened
5/12/2010	12:28:42 AM	Helium MFC set to  0.000000
5/12/2010	12:28:42 AM	H2 MFC set to  500.000000
5/12/2010	12:28:42 AM	BCl3 MFC set to  0.000000
5/12/2010	12:28:42 AM	SiCl4 MFC set to  500.000000
5/12/2010	12:28:42 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	12:28:42 AM	Tube furnace set to 1000
5/12/2010	12:48:42 AM	H2 valve closed
5/12/2010	12:48:42 AM	BCl3 valve closed
5/12/2010	12:48:42 AM	PH3 valve closed
5/12/2010	12:48:42 AM	SiCl4 pre valve closed
5/12/2010	12:48:42 AM	SiCl4 post valve closed
5/12/2010	12:48:42 AM	Main Vac valve closed
5/12/2010	12:48:42 AM	Bypass valve closed
5/12/2010	12:48:42 AM	Helium valve opened
5/12/2010	12:48:42 AM	Bubbler valve opened
5/12/2010	12:48:42 AM	Helium MFC set to  500.000000
5/12/2010	12:48:42 AM	H2 MFC set to  0.000000
5/12/2010	12:48:42 AM	BCl3 MFC set to  0.000000
5/12/2010	12:48:42 AM	SiCl4 MFC set to  0.000000
5/12/2010	12:48:42 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	12:48:42 AM	Tube furnace set to 750
5/12/2010	1:08:42 AM	H2 valve closed
5/12/2010	1:08:42 AM	BCl3 valve closed
5/12/2010	1:08:42 AM	PH3 valve closed
5/12/2010	1:08:42 AM	SiCl4 pre valve closed
5/12/2010	1:08:42 AM	SiCl4 post valve closed
5/12/2010	1:08:42 AM	Main Vac valve closed
5/12/2010	1:08:42 AM	Bypass valve closed
5/12/2010	1:08:42 AM	Helium valve opened
5/12/2010	1:08:42 AM	Bubbler valve opened
5/12/2010	1:08:42 AM	Helium MFC set to  500.000000
5/12/2010	1:08:42 AM	H2 MFC set to  0.000000
5/12/2010	1:08:42 AM	BCl3 MFC set to  0.000000
5/12/2010	1:08:42 AM	SiCl4 MFC set to  0.000000
5/12/2010	1:08:42 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	1:08:43 AM	Tube furnace set to 0
5/12/2010	1:15:56 AM	Helium valve closed
5/12/2010	1:15:56 AM	H2 valve closed
5/12/2010	1:15:56 AM	BCl3 valve closed
5/12/2010	1:15:56 AM	PH3 valve closed
5/12/2010	1:15:56 AM	SiCl4 pre valve closed
5/12/2010	1:15:56 AM	SiCl4 post valve closed
5/12/2010	1:15:56 AM	Main Vac valve closed
5/12/2010	1:15:56 AM	Bypass valve closed
5/12/2010	1:15:56 AM	Bubbler valve closed
5/12/2010	1:15:56 AM	Helium MFC set to  0.000000
5/12/2010	1:15:56 AM	H2 MFC set to  0.000000
5/12/2010	1:15:56 AM	BCl3 MFC set to  0.000000
5/12/2010	1:15:56 AM	SiCl4 MFC set to  0.000000
5/12/2010	1:15:56 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	1:15:56 AM	Tube furnace set to 0
5/12/2010	1:15:56 AM	Run finished at 1:15 AM
5/12/2010	1:20:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	1:20:04 AM	Recipe started at 1:20 AM
5/12/2010	1:20:04 AM	Helium valve closed
5/12/2010	1:20:04 AM	H2 valve closed
5/12/2010	1:20:04 AM	BCl3 valve closed
5/12/2010	1:20:04 AM	PH3 valve closed
5/12/2010	1:20:04 AM	SiCl4 pre valve closed
5/12/2010	1:20:04 AM	SiCl4 post valve closed
5/12/2010	1:20:04 AM	Main Vac valve closed
5/12/2010	1:20:04 AM	Bubbler valve closed
5/12/2010	1:20:04 AM	Bypass valve opened
5/12/2010	1:20:04 AM	Helium MFC set to  0.000000
5/12/2010	1:20:04 AM	H2 MFC set to  0.000000
5/12/2010	1:20:04 AM	BCl3 MFC set to  0.000000
5/12/2010	1:20:04 AM	SiCl4 MFC set to  0.000000
5/12/2010	1:20:04 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	1:20:04 AM	Tube furnace set to 0
5/12/2010	1:20:50 AM	Helium valve closed
5/12/2010	1:20:50 AM	H2 valve closed
5/12/2010	1:20:50 AM	BCl3 valve closed
5/12/2010	1:20:50 AM	PH3 valve closed
5/12/2010	1:20:50 AM	SiCl4 pre valve closed
5/12/2010	1:20:50 AM	SiCl4 post valve closed
5/12/2010	1:20:50 AM	Bubbler valve closed
5/12/2010	1:20:50 AM	Main Vac valve opened
5/12/2010	1:20:50 AM	Bypass valve opened
5/12/2010	1:20:50 AM	Helium MFC set to  0.000000
5/12/2010	1:20:50 AM	H2 MFC set to  0.000000
5/12/2010	1:20:50 AM	BCl3 MFC set to  0.000000
5/12/2010	1:20:50 AM	SiCl4 MFC set to  0.000000
5/12/2010	1:20:50 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	1:20:50 AM	Tube furnace set to 0
5/12/2010	1:20:51 AM	Run finished at 1:20 AM
5/12/2010	1:20:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	1:21:00 AM	Helium MFC set to  50.000000
5/12/2010	1:21:01 AM	Helium MFC set to  50.000000
5/12/2010	1:21:02 AM	Helium valve opened
5/12/2010	1:33:58 AM	Helium valve closed
5/12/2010	1:35:24 AM	Recipe started at 1:35 AM
5/12/2010	1:35:25 AM	Helium valve closed
5/12/2010	1:35:25 AM	BCl3 valve closed
5/12/2010	1:35:25 AM	PH3 valve closed
5/12/2010	1:35:25 AM	SiCl4 pre valve closed
5/12/2010	1:35:25 AM	SiCl4 post valve closed
5/12/2010	1:35:25 AM	Main Vac valve closed
5/12/2010	1:35:25 AM	Bypass valve closed
5/12/2010	1:35:25 AM	Bubbler valve closed
5/12/2010	1:35:25 AM	H2 valve opened
5/12/2010	1:35:25 AM	Helium MFC set to  0.000000
5/12/2010	1:35:25 AM	H2 MFC set to  500.000000
5/12/2010	1:35:25 AM	BCl3 MFC set to  0.000000
5/12/2010	1:35:25 AM	SiCl4 MFC set to  0.000000
5/12/2010	1:35:25 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	1:35:25 AM	Tube furnace set to 0
5/12/2010	1:36:44 AM	Helium valve closed
5/12/2010	1:36:44 AM	BCl3 valve closed
5/12/2010	1:36:44 AM	PH3 valve closed
5/12/2010	1:36:44 AM	SiCl4 pre valve closed
5/12/2010	1:36:44 AM	SiCl4 post valve closed
5/12/2010	1:36:44 AM	Main Vac valve closed
5/12/2010	1:36:44 AM	Bypass valve closed
5/12/2010	1:36:44 AM	H2 valve opened
5/12/2010	1:36:44 AM	Bubbler valve opened
5/12/2010	1:36:44 AM	Helium MFC set to  0.000000
5/12/2010	1:36:44 AM	H2 MFC set to  500.000000
5/12/2010	1:36:44 AM	BCl3 MFC set to  0.000000
5/12/2010	1:36:44 AM	SiCl4 MFC set to  0.000000
5/12/2010	1:36:44 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	1:36:44 AM	Tube furnace set to 1000
5/12/2010	1:56:44 AM	Helium valve closed
5/12/2010	1:56:44 AM	BCl3 valve closed
5/12/2010	1:56:44 AM	PH3 valve closed
5/12/2010	1:56:44 AM	Main Vac valve closed
5/12/2010	1:56:44 AM	Bypass valve closed
5/12/2010	1:56:44 AM	H2 valve opened
5/12/2010	1:56:44 AM	SiCl4 pre valve opened
5/12/2010	1:56:44 AM	SiCl4 post valve opened
5/12/2010	1:56:44 AM	Bubbler valve opened
5/12/2010	1:56:44 AM	Helium MFC set to  0.000000
5/12/2010	1:56:44 AM	H2 MFC set to  500.000000
5/12/2010	1:56:44 AM	BCl3 MFC set to  0.000000
5/12/2010	1:56:44 AM	SiCl4 MFC set to  500.000000
5/12/2010	1:56:44 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	1:56:45 AM	Tube furnace set to 1000
5/12/2010	2:16:45 AM	H2 valve closed
5/12/2010	2:16:45 AM	BCl3 valve closed
5/12/2010	2:16:45 AM	PH3 valve closed
5/12/2010	2:16:45 AM	SiCl4 pre valve closed
5/12/2010	2:16:45 AM	SiCl4 post valve closed
5/12/2010	2:16:45 AM	Main Vac valve closed
5/12/2010	2:16:45 AM	Bypass valve closed
5/12/2010	2:16:45 AM	Helium valve opened
5/12/2010	2:16:45 AM	Bubbler valve opened
5/12/2010	2:16:45 AM	Helium MFC set to  500.000000
5/12/2010	2:16:45 AM	H2 MFC set to  0.000000
5/12/2010	2:16:45 AM	BCl3 MFC set to  0.000000
5/12/2010	2:16:45 AM	SiCl4 MFC set to  0.000000
5/12/2010	2:16:45 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	2:16:45 AM	Tube furnace set to 750
5/12/2010	2:36:45 AM	H2 valve closed
5/12/2010	2:36:45 AM	BCl3 valve closed
5/12/2010	2:36:45 AM	PH3 valve closed
5/12/2010	2:36:45 AM	SiCl4 pre valve closed
5/12/2010	2:36:45 AM	SiCl4 post valve closed
5/12/2010	2:36:45 AM	Main Vac valve closed
5/12/2010	2:36:45 AM	Bypass valve closed
5/12/2010	2:36:45 AM	Helium valve opened
5/12/2010	2:36:45 AM	Bubbler valve opened
5/12/2010	2:36:45 AM	Helium MFC set to  500.000000
5/12/2010	2:36:45 AM	H2 MFC set to  0.000000
5/12/2010	2:36:45 AM	BCl3 MFC set to  0.000000
5/12/2010	2:36:45 AM	SiCl4 MFC set to  0.000000
5/12/2010	2:36:45 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	2:36:45 AM	Tube furnace set to 0
5/12/2010	2:47:10 AM	Helium valve closed
5/12/2010	2:47:10 AM	H2 valve closed
5/12/2010	2:47:10 AM	BCl3 valve closed
5/12/2010	2:47:10 AM	PH3 valve closed
5/12/2010	2:47:10 AM	SiCl4 pre valve closed
5/12/2010	2:47:10 AM	SiCl4 post valve closed
5/12/2010	2:47:10 AM	Main Vac valve closed
5/12/2010	2:47:10 AM	Bypass valve closed
5/12/2010	2:47:10 AM	Bubbler valve closed
5/12/2010	2:47:10 AM	Helium MFC set to  0.000000
5/12/2010	2:47:10 AM	H2 MFC set to  0.000000
5/12/2010	2:47:10 AM	BCl3 MFC set to  0.000000
5/12/2010	2:47:10 AM	SiCl4 MFC set to  0.000000
5/12/2010	2:47:10 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	2:47:10 AM	Tube furnace set to 0
5/12/2010	2:47:10 AM	Run finished at 2:47 AM
5/12/2010	2:50:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	2:50:47 AM	Recipe started at 2:50 AM
5/12/2010	2:50:47 AM	Helium valve closed
5/12/2010	2:50:47 AM	H2 valve closed
5/12/2010	2:50:47 AM	BCl3 valve closed
5/12/2010	2:50:47 AM	PH3 valve closed
5/12/2010	2:50:47 AM	SiCl4 pre valve closed
5/12/2010	2:50:47 AM	SiCl4 post valve closed
5/12/2010	2:50:47 AM	Main Vac valve closed
5/12/2010	2:50:47 AM	Bubbler valve closed
5/12/2010	2:50:47 AM	Bypass valve opened
5/12/2010	2:50:47 AM	Helium MFC set to  0.000000
5/12/2010	2:50:47 AM	H2 MFC set to  0.000000
5/12/2010	2:50:47 AM	BCl3 MFC set to  0.000000
5/12/2010	2:50:47 AM	SiCl4 MFC set to  0.000000
5/12/2010	2:50:47 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	2:50:47 AM	Tube furnace set to 0
5/12/2010	2:51:34 AM	Helium valve closed
5/12/2010	2:51:34 AM	H2 valve closed
5/12/2010	2:51:34 AM	BCl3 valve closed
5/12/2010	2:51:34 AM	PH3 valve closed
5/12/2010	2:51:34 AM	SiCl4 pre valve closed
5/12/2010	2:51:34 AM	SiCl4 post valve closed
5/12/2010	2:51:34 AM	Bubbler valve closed
5/12/2010	2:51:34 AM	Main Vac valve opened
5/12/2010	2:51:34 AM	Bypass valve opened
5/12/2010	2:51:34 AM	Helium MFC set to  0.000000
5/12/2010	2:51:34 AM	H2 MFC set to  0.000000
5/12/2010	2:51:34 AM	BCl3 MFC set to  0.000000
5/12/2010	2:51:34 AM	SiCl4 MFC set to  0.000000
5/12/2010	2:51:34 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	2:51:34 AM	Tube furnace set to 0
5/12/2010	2:51:34 AM	Run finished at 2:51 AM
5/12/2010	2:51:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	2:52:58 AM	Helium MFC set to  50.000000
5/12/2010	2:52:59 AM	Helium valve opened
5/12/2010	2:56:48 AM	Helium valve closed
5/12/2010	2:56:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/12/2010	2:56:51 AM	Recipe started at 2:56 AM
5/12/2010	2:56:51 AM	H2 valve closed
5/12/2010	2:56:51 AM	BCl3 valve closed
5/12/2010	2:56:51 AM	PH3 valve closed
5/12/2010	2:56:51 AM	SiCl4 pre valve closed
5/12/2010	2:56:51 AM	SiCl4 post valve closed
5/12/2010	2:56:51 AM	Main Vac valve closed
5/12/2010	2:56:51 AM	Bypass valve closed
5/12/2010	2:56:51 AM	Bubbler valve closed
5/12/2010	2:56:51 AM	Helium valve opened
5/12/2010	2:56:51 AM	Helium MFC set to  500.000000
5/12/2010	2:56:51 AM	H2 MFC set to  0.000000
5/12/2010	2:56:51 AM	BCl3 MFC set to  0.000000
5/12/2010	2:56:51 AM	SiCl4 MFC set to  0.000000
5/12/2010	2:56:51 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	2:56:51 AM	Tube furnace set to 0
5/12/2010	2:58:09 AM	Helium valve closed
5/12/2010	2:58:09 AM	H2 valve closed
5/12/2010	2:58:09 AM	BCl3 valve closed
5/12/2010	2:58:09 AM	PH3 valve closed
5/12/2010	2:58:09 AM	SiCl4 pre valve closed
5/12/2010	2:58:09 AM	SiCl4 post valve closed
5/12/2010	2:58:09 AM	Main Vac valve closed
5/12/2010	2:58:09 AM	Bypass valve closed
5/12/2010	2:58:09 AM	Bubbler valve closed
5/12/2010	2:58:09 AM	Helium MFC set to  0.000000
5/12/2010	2:58:09 AM	H2 MFC set to  0.000000
5/12/2010	2:58:09 AM	BCl3 MFC set to  0.000000
5/12/2010	2:58:09 AM	SiCl4 MFC set to  0.000000
5/12/2010	2:58:09 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	2:58:10 AM	Tube furnace set to 0
5/12/2010	2:58:10 AM	Run finished at 2:58 AM
5/12/2010	2:58:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/12/2010	3:01:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	3:01:20 AM	Recipe started at 3:01 AM
5/12/2010	3:01:20 AM	Helium valve closed
5/12/2010	3:01:20 AM	H2 valve closed
5/12/2010	3:01:20 AM	BCl3 valve closed
5/12/2010	3:01:20 AM	PH3 valve closed
5/12/2010	3:01:20 AM	SiCl4 pre valve closed
5/12/2010	3:01:20 AM	SiCl4 post valve closed
5/12/2010	3:01:20 AM	Main Vac valve closed
5/12/2010	3:01:20 AM	Bubbler valve closed
5/12/2010	3:01:20 AM	Bypass valve opened
5/12/2010	3:01:20 AM	Helium MFC set to  0.000000
5/12/2010	3:01:20 AM	H2 MFC set to  0.000000
5/12/2010	3:01:20 AM	BCl3 MFC set to  0.000000
5/12/2010	3:01:20 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:01:20 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:01:21 AM	Tube furnace set to 0
5/12/2010	3:02:05 AM	Helium valve closed
5/12/2010	3:02:05 AM	H2 valve closed
5/12/2010	3:02:05 AM	BCl3 valve closed
5/12/2010	3:02:05 AM	PH3 valve closed
5/12/2010	3:02:05 AM	SiCl4 pre valve closed
5/12/2010	3:02:05 AM	SiCl4 post valve closed
5/12/2010	3:02:05 AM	Bubbler valve closed
5/12/2010	3:02:05 AM	Main Vac valve opened
5/12/2010	3:02:05 AM	Bypass valve opened
5/12/2010	3:02:05 AM	Helium MFC set to  0.000000
5/12/2010	3:02:05 AM	H2 MFC set to  0.000000
5/12/2010	3:02:05 AM	BCl3 MFC set to  0.000000
5/12/2010	3:02:05 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:02:05 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:02:05 AM	Tube furnace set to 0
5/12/2010	3:02:05 AM	Run finished at 3:02 AM
5/12/2010	3:02:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	3:02:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/12/2010	3:02:28 AM	Recipe started at 3:02 AM
5/12/2010	3:02:28 AM	H2 valve closed
5/12/2010	3:02:28 AM	BCl3 valve closed
5/12/2010	3:02:28 AM	PH3 valve closed
5/12/2010	3:02:28 AM	SiCl4 pre valve closed
5/12/2010	3:02:28 AM	SiCl4 post valve closed
5/12/2010	3:02:28 AM	Main Vac valve closed
5/12/2010	3:02:28 AM	Bypass valve closed
5/12/2010	3:02:28 AM	Bubbler valve closed
5/12/2010	3:02:28 AM	Helium valve opened
5/12/2010	3:02:28 AM	Helium MFC set to  500.000000
5/12/2010	3:02:28 AM	H2 MFC set to  0.000000
5/12/2010	3:02:28 AM	BCl3 MFC set to  0.000000
5/12/2010	3:02:28 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:02:28 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:02:28 AM	Tube furnace set to 0
5/12/2010	3:03:47 AM	Helium valve closed
5/12/2010	3:03:47 AM	H2 valve closed
5/12/2010	3:03:47 AM	BCl3 valve closed
5/12/2010	3:03:47 AM	PH3 valve closed
5/12/2010	3:03:47 AM	SiCl4 pre valve closed
5/12/2010	3:03:47 AM	SiCl4 post valve closed
5/12/2010	3:03:47 AM	Main Vac valve closed
5/12/2010	3:03:47 AM	Bypass valve closed
5/12/2010	3:03:47 AM	Bubbler valve closed
5/12/2010	3:03:47 AM	Helium MFC set to  0.000000
5/12/2010	3:03:47 AM	H2 MFC set to  0.000000
5/12/2010	3:03:47 AM	BCl3 MFC set to  0.000000
5/12/2010	3:03:47 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:03:47 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:03:47 AM	Tube furnace set to 0
5/12/2010	3:03:47 AM	Run finished at 3:03 AM
5/12/2010	3:03:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/12/2010	3:05:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	3:05:31 AM	Recipe started at 3:05 AM
5/12/2010	3:05:31 AM	Helium valve closed
5/12/2010	3:05:31 AM	H2 valve closed
5/12/2010	3:05:31 AM	BCl3 valve closed
5/12/2010	3:05:31 AM	PH3 valve closed
5/12/2010	3:05:31 AM	SiCl4 pre valve closed
5/12/2010	3:05:31 AM	SiCl4 post valve closed
5/12/2010	3:05:31 AM	Main Vac valve closed
5/12/2010	3:05:31 AM	Bubbler valve closed
5/12/2010	3:05:31 AM	Bypass valve opened
5/12/2010	3:05:31 AM	Helium MFC set to  0.000000
5/12/2010	3:05:31 AM	H2 MFC set to  0.000000
5/12/2010	3:05:31 AM	BCl3 MFC set to  0.000000
5/12/2010	3:05:31 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:05:31 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:05:32 AM	Tube furnace set to 0
5/12/2010	3:06:16 AM	Helium valve closed
5/12/2010	3:06:16 AM	H2 valve closed
5/12/2010	3:06:16 AM	BCl3 valve closed
5/12/2010	3:06:16 AM	PH3 valve closed
5/12/2010	3:06:16 AM	SiCl4 pre valve closed
5/12/2010	3:06:16 AM	SiCl4 post valve closed
5/12/2010	3:06:16 AM	Bubbler valve closed
5/12/2010	3:06:16 AM	Main Vac valve opened
5/12/2010	3:06:16 AM	Bypass valve opened
5/12/2010	3:06:16 AM	Helium MFC set to  0.000000
5/12/2010	3:06:16 AM	H2 MFC set to  0.000000
5/12/2010	3:06:16 AM	BCl3 MFC set to  0.000000
5/12/2010	3:06:16 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:06:16 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:06:16 AM	Tube furnace set to 0
5/12/2010	3:06:16 AM	Run finished at 3:06 AM
5/12/2010	3:06:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	3:06:37 AM	Helium MFC set to  50.000000
5/12/2010	3:06:37 AM	Helium valve opened
5/12/2010	3:15:53 AM	Helium valve closed
5/12/2010	3:16:30 AM	Helium valve opened
5/12/2010	3:21:42 AM	Helium valve closed
5/12/2010	3:22:43 AM	Helium valve opened
5/12/2010	3:28:29 AM	Helium valve closed
5/12/2010	3:29:27 AM	Recipe started at 3:29 AM
5/12/2010	3:29:27 AM	Helium valve closed
5/12/2010	3:29:27 AM	BCl3 valve closed
5/12/2010	3:29:27 AM	PH3 valve closed
5/12/2010	3:29:27 AM	SiCl4 pre valve closed
5/12/2010	3:29:27 AM	SiCl4 post valve closed
5/12/2010	3:29:27 AM	Main Vac valve closed
5/12/2010	3:29:27 AM	Bypass valve closed
5/12/2010	3:29:27 AM	Bubbler valve closed
5/12/2010	3:29:27 AM	H2 valve opened
5/12/2010	3:29:27 AM	Helium MFC set to  0.000000
5/12/2010	3:29:27 AM	H2 MFC set to  500.000000
5/12/2010	3:29:27 AM	BCl3 MFC set to  0.000000
5/12/2010	3:29:27 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:29:27 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:29:27 AM	Tube furnace set to 0
5/12/2010	3:30:47 AM	Helium valve closed
5/12/2010	3:30:47 AM	BCl3 valve closed
5/12/2010	3:30:47 AM	PH3 valve closed
5/12/2010	3:30:47 AM	SiCl4 pre valve closed
5/12/2010	3:30:47 AM	SiCl4 post valve closed
5/12/2010	3:30:47 AM	Main Vac valve closed
5/12/2010	3:30:47 AM	Bypass valve closed
5/12/2010	3:30:47 AM	H2 valve opened
5/12/2010	3:30:47 AM	Bubbler valve opened
5/12/2010	3:30:47 AM	Helium MFC set to  0.000000
5/12/2010	3:30:47 AM	H2 MFC set to  500.000000
5/12/2010	3:30:47 AM	BCl3 MFC set to  0.000000
5/12/2010	3:30:47 AM	SiCl4 MFC set to  0.000000
5/12/2010	3:30:47 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:30:47 AM	Tube furnace set to 1000
5/12/2010	3:50:47 AM	Helium valve closed
5/12/2010	3:50:47 AM	BCl3 valve closed
5/12/2010	3:50:47 AM	PH3 valve closed
5/12/2010	3:50:47 AM	Main Vac valve closed
5/12/2010	3:50:47 AM	Bypass valve closed
5/12/2010	3:50:47 AM	H2 valve opened
5/12/2010	3:50:47 AM	SiCl4 pre valve opened
5/12/2010	3:50:47 AM	SiCl4 post valve opened
5/12/2010	3:50:47 AM	Bubbler valve opened
5/12/2010	3:50:47 AM	Helium MFC set to  0.000000
5/12/2010	3:50:47 AM	H2 MFC set to  500.000000
5/12/2010	3:50:47 AM	BCl3 MFC set to  0.000000
5/12/2010	3:50:47 AM	SiCl4 MFC set to  500.000000
5/12/2010	3:50:47 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	3:50:47 AM	Tube furnace set to 1000
5/12/2010	4:17:49 AM	H2 valve closed
5/12/2010	4:17:49 AM	BCl3 valve closed
5/12/2010	4:17:49 AM	PH3 valve closed
5/12/2010	4:17:49 AM	SiCl4 pre valve closed
5/12/2010	4:17:49 AM	SiCl4 post valve closed
5/12/2010	4:17:49 AM	Main Vac valve closed
5/12/2010	4:17:49 AM	Bypass valve closed
5/12/2010	4:17:49 AM	Helium valve opened
5/12/2010	4:17:49 AM	Bubbler valve opened
5/12/2010	4:17:49 AM	Helium MFC set to  500.000000
5/12/2010	4:17:49 AM	H2 MFC set to  0.000000
5/12/2010	4:17:49 AM	BCl3 MFC set to  0.000000
5/12/2010	4:17:49 AM	SiCl4 MFC set to  0.000000
5/12/2010	4:17:49 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	4:17:49 AM	Tube furnace set to 750
5/12/2010	4:37:49 AM	H2 valve closed
5/12/2010	4:37:49 AM	BCl3 valve closed
5/12/2010	4:37:49 AM	PH3 valve closed
5/12/2010	4:37:49 AM	SiCl4 pre valve closed
5/12/2010	4:37:49 AM	SiCl4 post valve closed
5/12/2010	4:37:49 AM	Main Vac valve closed
5/12/2010	4:37:49 AM	Bypass valve closed
5/12/2010	4:37:49 AM	Helium valve opened
5/12/2010	4:37:49 AM	Bubbler valve opened
5/12/2010	4:37:49 AM	Helium MFC set to  500.000000
5/12/2010	4:37:49 AM	H2 MFC set to  0.000000
5/12/2010	4:37:49 AM	BCl3 MFC set to  0.000000
5/12/2010	4:37:49 AM	SiCl4 MFC set to  0.000000
5/12/2010	4:37:49 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	4:37:49 AM	Tube furnace set to 0
5/12/2010	4:40:24 AM	Helium valve closed
5/12/2010	4:40:24 AM	H2 valve closed
5/12/2010	4:40:24 AM	BCl3 valve closed
5/12/2010	4:40:24 AM	PH3 valve closed
5/12/2010	4:40:24 AM	SiCl4 pre valve closed
5/12/2010	4:40:24 AM	SiCl4 post valve closed
5/12/2010	4:40:24 AM	Main Vac valve closed
5/12/2010	4:40:24 AM	Bypass valve closed
5/12/2010	4:40:24 AM	Bubbler valve closed
5/12/2010	4:40:24 AM	Helium MFC set to  0.000000
5/12/2010	4:40:24 AM	H2 MFC set to  0.000000
5/12/2010	4:40:24 AM	BCl3 MFC set to  0.000000
5/12/2010	4:40:24 AM	SiCl4 MFC set to  0.000000
5/12/2010	4:40:24 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	4:40:24 AM	Tube furnace set to 0
5/12/2010	4:40:24 AM	Run finished at 4:40 AM
5/12/2010	4:43:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	4:43:48 AM	Recipe started at 4:43 AM
5/12/2010	4:43:48 AM	Helium valve closed
5/12/2010	4:43:48 AM	H2 valve closed
5/12/2010	4:43:48 AM	BCl3 valve closed
5/12/2010	4:43:48 AM	PH3 valve closed
5/12/2010	4:43:48 AM	SiCl4 pre valve closed
5/12/2010	4:43:48 AM	SiCl4 post valve closed
5/12/2010	4:43:48 AM	Main Vac valve closed
5/12/2010	4:43:48 AM	Bubbler valve closed
5/12/2010	4:43:48 AM	Bypass valve opened
5/12/2010	4:43:48 AM	Helium MFC set to  0.000000
5/12/2010	4:43:48 AM	H2 MFC set to  0.000000
5/12/2010	4:43:48 AM	BCl3 MFC set to  0.000000
5/12/2010	4:43:48 AM	SiCl4 MFC set to  0.000000
5/12/2010	4:43:48 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	4:43:49 AM	Tube furnace set to 0
5/12/2010	4:44:34 AM	Helium valve closed
5/12/2010	4:44:34 AM	H2 valve closed
5/12/2010	4:44:34 AM	BCl3 valve closed
5/12/2010	4:44:34 AM	PH3 valve closed
5/12/2010	4:44:34 AM	SiCl4 pre valve closed
5/12/2010	4:44:34 AM	SiCl4 post valve closed
5/12/2010	4:44:34 AM	Bubbler valve closed
5/12/2010	4:44:34 AM	Main Vac valve opened
5/12/2010	4:44:34 AM	Bypass valve opened
5/12/2010	4:44:34 AM	Helium MFC set to  0.000000
5/12/2010	4:44:34 AM	H2 MFC set to  0.000000
5/12/2010	4:44:34 AM	BCl3 MFC set to  0.000000
5/12/2010	4:44:34 AM	SiCl4 MFC set to  0.000000
5/12/2010	4:44:34 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	4:44:34 AM	Tube furnace set to 0
5/12/2010	4:44:34 AM	Run finished at 4:44 AM
5/12/2010	4:44:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	4:46:13 AM	Helium MFC set to  50.000000
5/12/2010	4:46:14 AM	Helium valve opened
5/12/2010	4:51:36 AM	Helium valve closed
5/12/2010	4:52:17 AM	Helium valve opened
5/12/2010	5:03:32 AM	Helium valve closed
5/12/2010	5:04:18 AM	Recipe started at 5:04 AM
5/12/2010	5:04:18 AM	Helium valve closed
5/12/2010	5:04:18 AM	BCl3 valve closed
5/12/2010	5:04:18 AM	PH3 valve closed
5/12/2010	5:04:18 AM	SiCl4 pre valve closed
5/12/2010	5:04:18 AM	SiCl4 post valve closed
5/12/2010	5:04:18 AM	Main Vac valve closed
5/12/2010	5:04:18 AM	Bypass valve closed
5/12/2010	5:04:18 AM	Bubbler valve closed
5/12/2010	5:04:18 AM	H2 valve opened
5/12/2010	5:04:18 AM	Helium MFC set to  0.000000
5/12/2010	5:04:18 AM	H2 MFC set to  500.000000
5/12/2010	5:04:18 AM	BCl3 MFC set to  0.000000
5/12/2010	5:04:18 AM	SiCl4 MFC set to  0.000000
5/12/2010	5:04:18 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	5:04:18 AM	Tube furnace set to 0
5/12/2010	5:05:36 AM	Helium valve closed
5/12/2010	5:05:36 AM	BCl3 valve closed
5/12/2010	5:05:36 AM	PH3 valve closed
5/12/2010	5:05:36 AM	SiCl4 pre valve closed
5/12/2010	5:05:36 AM	SiCl4 post valve closed
5/12/2010	5:05:36 AM	Main Vac valve closed
5/12/2010	5:05:36 AM	Bypass valve closed
5/12/2010	5:05:36 AM	H2 valve opened
5/12/2010	5:05:36 AM	Bubbler valve opened
5/12/2010	5:05:36 AM	Helium MFC set to  0.000000
5/12/2010	5:05:36 AM	H2 MFC set to  500.000000
5/12/2010	5:05:36 AM	BCl3 MFC set to  0.000000
5/12/2010	5:05:36 AM	SiCl4 MFC set to  0.000000
5/12/2010	5:05:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	5:05:36 AM	Tube furnace set to 1000
5/12/2010	5:25:36 AM	Helium valve closed
5/12/2010	5:25:36 AM	BCl3 valve closed
5/12/2010	5:25:36 AM	PH3 valve closed
5/12/2010	5:25:36 AM	Main Vac valve closed
5/12/2010	5:25:36 AM	Bypass valve closed
5/12/2010	5:25:36 AM	H2 valve opened
5/12/2010	5:25:36 AM	SiCl4 pre valve opened
5/12/2010	5:25:36 AM	SiCl4 post valve opened
5/12/2010	5:25:36 AM	Bubbler valve opened
5/12/2010	5:25:36 AM	Helium MFC set to  0.000000
5/12/2010	5:25:36 AM	H2 MFC set to  500.000000
5/12/2010	5:25:36 AM	BCl3 MFC set to  0.000000
5/12/2010	5:25:36 AM	SiCl4 MFC set to  500.000000
5/12/2010	5:25:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	5:25:36 AM	Tube furnace set to 1000
5/12/2010	5:55:36 AM	H2 valve closed
5/12/2010	5:55:36 AM	BCl3 valve closed
5/12/2010	5:55:36 AM	PH3 valve closed
5/12/2010	5:55:36 AM	SiCl4 pre valve closed
5/12/2010	5:55:36 AM	SiCl4 post valve closed
5/12/2010	5:55:36 AM	Main Vac valve closed
5/12/2010	5:55:36 AM	Bypass valve closed
5/12/2010	5:55:36 AM	Helium valve opened
5/12/2010	5:55:36 AM	Bubbler valve opened
5/12/2010	5:55:36 AM	Helium MFC set to  500.000000
5/12/2010	5:55:36 AM	H2 MFC set to  0.000000
5/12/2010	5:55:36 AM	BCl3 MFC set to  0.000000
5/12/2010	5:55:36 AM	SiCl4 MFC set to  0.000000
5/12/2010	5:55:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	5:55:36 AM	Tube furnace set to 750
5/12/2010	6:15:36 AM	H2 valve closed
5/12/2010	6:15:36 AM	BCl3 valve closed
5/12/2010	6:15:36 AM	PH3 valve closed
5/12/2010	6:15:36 AM	SiCl4 pre valve closed
5/12/2010	6:15:36 AM	SiCl4 post valve closed
5/12/2010	6:15:36 AM	Main Vac valve closed
5/12/2010	6:15:36 AM	Bypass valve closed
5/12/2010	6:15:36 AM	Helium valve opened
5/12/2010	6:15:36 AM	Bubbler valve opened
5/12/2010	6:15:36 AM	Helium MFC set to  500.000000
5/12/2010	6:15:36 AM	H2 MFC set to  0.000000
5/12/2010	6:15:36 AM	BCl3 MFC set to  0.000000
5/12/2010	6:15:36 AM	SiCl4 MFC set to  0.000000
5/12/2010	6:15:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	6:15:36 AM	Tube furnace set to 0
5/12/2010	6:18:18 AM	Helium valve closed
5/12/2010	6:18:18 AM	H2 valve closed
5/12/2010	6:18:18 AM	BCl3 valve closed
5/12/2010	6:18:18 AM	PH3 valve closed
5/12/2010	6:18:18 AM	SiCl4 pre valve closed
5/12/2010	6:18:18 AM	SiCl4 post valve closed
5/12/2010	6:18:18 AM	Main Vac valve closed
5/12/2010	6:18:18 AM	Bypass valve closed
5/12/2010	6:18:18 AM	Bubbler valve closed
5/12/2010	6:18:18 AM	Helium MFC set to  0.000000
5/12/2010	6:18:18 AM	H2 MFC set to  0.000000
5/12/2010	6:18:18 AM	BCl3 MFC set to  0.000000
5/12/2010	6:18:18 AM	SiCl4 MFC set to  0.000000
5/12/2010	6:18:18 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	6:18:18 AM	Tube furnace set to 0
5/12/2010	6:18:18 AM	Run finished at 6:18 AM
5/12/2010	6:21:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	6:21:54 AM	Recipe started at 6:21 AM
5/12/2010	6:21:54 AM	Helium valve closed
5/12/2010	6:21:54 AM	H2 valve closed
5/12/2010	6:21:54 AM	BCl3 valve closed
5/12/2010	6:21:54 AM	PH3 valve closed
5/12/2010	6:21:54 AM	SiCl4 pre valve closed
5/12/2010	6:21:54 AM	SiCl4 post valve closed
5/12/2010	6:21:54 AM	Main Vac valve closed
5/12/2010	6:21:54 AM	Bubbler valve closed
5/12/2010	6:21:54 AM	Bypass valve opened
5/12/2010	6:21:54 AM	Helium MFC set to  0.000000
5/12/2010	6:21:54 AM	H2 MFC set to  0.000000
5/12/2010	6:21:54 AM	BCl3 MFC set to  0.000000
5/12/2010	6:21:54 AM	SiCl4 MFC set to  0.000000
5/12/2010	6:21:54 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	6:21:55 AM	Tube furnace set to 0
5/12/2010	6:22:40 AM	Helium valve closed
5/12/2010	6:22:40 AM	H2 valve closed
5/12/2010	6:22:40 AM	BCl3 valve closed
5/12/2010	6:22:40 AM	PH3 valve closed
5/12/2010	6:22:40 AM	SiCl4 pre valve closed
5/12/2010	6:22:40 AM	SiCl4 post valve closed
5/12/2010	6:22:40 AM	Bubbler valve closed
5/12/2010	6:22:40 AM	Main Vac valve opened
5/12/2010	6:22:40 AM	Bypass valve opened
5/12/2010	6:22:40 AM	Helium MFC set to  0.000000
5/12/2010	6:22:40 AM	H2 MFC set to  0.000000
5/12/2010	6:22:40 AM	BCl3 MFC set to  0.000000
5/12/2010	6:22:40 AM	SiCl4 MFC set to  0.000000
5/12/2010	6:22:40 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	6:22:40 AM	Tube furnace set to 0
5/12/2010	6:22:40 AM	Run finished at 6:22 AM
5/12/2010	6:22:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	6:24:01 AM	Helium MFC set to  100.000000
5/12/2010	6:24:02 AM	Helium valve opened
5/12/2010	6:25:30 AM	Helium valve closed
5/12/2010	6:44:25 AM	Helium valve opened
5/12/2010	6:49:38 AM	Helium valve closed
5/12/2010	6:50:38 AM	Recipe started at 6:50 AM
5/12/2010	6:50:38 AM	Helium valve closed
5/12/2010	6:50:38 AM	BCl3 valve closed
5/12/2010	6:50:38 AM	PH3 valve closed
5/12/2010	6:50:38 AM	SiCl4 pre valve closed
5/12/2010	6:50:38 AM	SiCl4 post valve closed
5/12/2010	6:50:38 AM	Main Vac valve closed
5/12/2010	6:50:38 AM	Bypass valve closed
5/12/2010	6:50:38 AM	Bubbler valve closed
5/12/2010	6:50:38 AM	H2 valve opened
5/12/2010	6:50:38 AM	Helium MFC set to  0.000000
5/12/2010	6:50:38 AM	H2 MFC set to  500.000000
5/12/2010	6:50:38 AM	BCl3 MFC set to  0.000000
5/12/2010	6:50:38 AM	SiCl4 MFC set to  0.000000
5/12/2010	6:50:38 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	6:50:39 AM	Tube furnace set to 0
5/12/2010	6:51:57 AM	Helium valve closed
5/12/2010	6:51:57 AM	BCl3 valve closed
5/12/2010	6:51:57 AM	PH3 valve closed
5/12/2010	6:51:57 AM	SiCl4 pre valve closed
5/12/2010	6:51:57 AM	SiCl4 post valve closed
5/12/2010	6:51:57 AM	Main Vac valve closed
5/12/2010	6:51:57 AM	Bypass valve closed
5/12/2010	6:51:57 AM	H2 valve opened
5/12/2010	6:51:57 AM	Bubbler valve opened
5/12/2010	6:51:57 AM	Helium MFC set to  0.000000
5/12/2010	6:51:57 AM	H2 MFC set to  500.000000
5/12/2010	6:51:57 AM	BCl3 MFC set to  0.000000
5/12/2010	6:51:57 AM	SiCl4 MFC set to  0.000000
5/12/2010	6:51:57 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	6:51:57 AM	Tube furnace set to 1000
5/12/2010	7:11:57 AM	Helium valve closed
5/12/2010	7:11:57 AM	BCl3 valve closed
5/12/2010	7:11:57 AM	PH3 valve closed
5/12/2010	7:11:57 AM	Main Vac valve closed
5/12/2010	7:11:57 AM	Bypass valve closed
5/12/2010	7:11:57 AM	H2 valve opened
5/12/2010	7:11:57 AM	SiCl4 pre valve opened
5/12/2010	7:11:57 AM	SiCl4 post valve opened
5/12/2010	7:11:57 AM	Bubbler valve opened
5/12/2010	7:11:57 AM	Helium MFC set to  0.000000
5/12/2010	7:11:57 AM	H2 MFC set to  500.000000
5/12/2010	7:11:57 AM	BCl3 MFC set to  0.000000
5/12/2010	7:11:57 AM	SiCl4 MFC set to  500.000000
5/12/2010	7:11:57 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	7:11:57 AM	Tube furnace set to 1000
5/12/2010	7:45:17 AM	H2 valve closed
5/12/2010	7:45:17 AM	BCl3 valve closed
5/12/2010	7:45:17 AM	PH3 valve closed
5/12/2010	7:45:17 AM	SiCl4 pre valve closed
5/12/2010	7:45:17 AM	SiCl4 post valve closed
5/12/2010	7:45:17 AM	Main Vac valve closed
5/12/2010	7:45:17 AM	Bypass valve closed
5/12/2010	7:45:17 AM	Helium valve opened
5/12/2010	7:45:17 AM	Bubbler valve opened
5/12/2010	7:45:17 AM	Helium MFC set to  500.000000
5/12/2010	7:45:17 AM	H2 MFC set to  0.000000
5/12/2010	7:45:17 AM	BCl3 MFC set to  0.000000
5/12/2010	7:45:17 AM	SiCl4 MFC set to  0.000000
5/12/2010	7:45:17 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	7:45:17 AM	Tube furnace set to 750
5/12/2010	8:03:33 AM	H2 valve closed
5/12/2010	8:03:33 AM	BCl3 valve closed
5/12/2010	8:03:33 AM	PH3 valve closed
5/12/2010	8:03:33 AM	SiCl4 pre valve closed
5/12/2010	8:03:33 AM	SiCl4 post valve closed
5/12/2010	8:03:33 AM	Main Vac valve closed
5/12/2010	8:03:33 AM	Bypass valve closed
5/12/2010	8:03:33 AM	Helium valve opened
5/12/2010	8:03:33 AM	Bubbler valve opened
5/12/2010	8:03:33 AM	Helium MFC set to  500.000000
5/12/2010	8:03:33 AM	H2 MFC set to  0.000000
5/12/2010	8:03:33 AM	BCl3 MFC set to  0.000000
5/12/2010	8:03:33 AM	SiCl4 MFC set to  0.000000
5/12/2010	8:03:33 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	8:03:33 AM	Tube furnace set to 0
5/12/2010	8:04:36 AM	Helium valve closed
5/12/2010	8:04:36 AM	H2 valve closed
5/12/2010	8:04:36 AM	BCl3 valve closed
5/12/2010	8:04:36 AM	PH3 valve closed
5/12/2010	8:04:36 AM	SiCl4 pre valve closed
5/12/2010	8:04:36 AM	SiCl4 post valve closed
5/12/2010	8:04:36 AM	Main Vac valve closed
5/12/2010	8:04:36 AM	Bypass valve closed
5/12/2010	8:04:36 AM	Bubbler valve closed
5/12/2010	8:04:36 AM	Helium MFC set to  0.000000
5/12/2010	8:04:36 AM	H2 MFC set to  0.000000
5/12/2010	8:04:36 AM	BCl3 MFC set to  0.000000
5/12/2010	8:04:36 AM	SiCl4 MFC set to  0.000000
5/12/2010	8:04:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	8:04:37 AM	Tube furnace set to 0
5/12/2010	8:04:37 AM	Run finished at 8:04 AM
5/12/2010	8:06:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/12/2010	8:06:21 AM	Recipe started at 8:06 AM
5/12/2010	8:06:21 AM	Helium valve closed
5/12/2010	8:06:21 AM	H2 valve closed
5/12/2010	8:06:21 AM	BCl3 valve closed
5/12/2010	8:06:21 AM	PH3 valve closed
5/12/2010	8:06:21 AM	SiCl4 pre valve closed
5/12/2010	8:06:21 AM	SiCl4 post valve closed
5/12/2010	8:06:21 AM	Main Vac valve closed
5/12/2010	8:06:21 AM	Bubbler valve closed
5/12/2010	8:06:21 AM	Bypass valve opened
5/12/2010	8:06:21 AM	Helium MFC set to  0.000000
5/12/2010	8:06:21 AM	H2 MFC set to  0.000000
5/12/2010	8:06:21 AM	BCl3 MFC set to  0.000000
5/12/2010	8:06:21 AM	SiCl4 MFC set to  0.000000
5/12/2010	8:06:21 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	8:06:21 AM	Tube furnace set to 0
5/12/2010	8:07:05 AM	Helium valve closed
5/12/2010	8:07:05 AM	H2 valve closed
5/12/2010	8:07:05 AM	BCl3 valve closed
5/12/2010	8:07:05 AM	PH3 valve closed
5/12/2010	8:07:05 AM	SiCl4 pre valve closed
5/12/2010	8:07:05 AM	SiCl4 post valve closed
5/12/2010	8:07:05 AM	Bubbler valve closed
5/12/2010	8:07:05 AM	Main Vac valve opened
5/12/2010	8:07:05 AM	Bypass valve opened
5/12/2010	8:07:05 AM	Helium MFC set to  0.000000
5/12/2010	8:07:05 AM	H2 MFC set to  0.000000
5/12/2010	8:07:05 AM	BCl3 MFC set to  0.000000
5/12/2010	8:07:05 AM	SiCl4 MFC set to  0.000000
5/12/2010	8:07:05 AM	Bypass solenoid MFC set to  0.000000
5/12/2010	8:07:05 AM	Tube furnace set to 0
5/12/2010	8:07:06 AM	Run finished at 8:07 AM
5/12/2010	8:07:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
